It was built by the Pallavas in the early 8th century CE. It is famous for its splendid vimana. It also contains numerous panels showing lord Siva as Nataraja in various postures.This temple was built by Pallava King Narasimhavarman II (Rajasimhan), and so is also called Rajasimha Pallaveswaram.
The Chola King Rajaraja Chola I visited this temple and named this temple as Kachipettu Periya Thirukatrali(Stone Temple of Kachipettu(ancient name of Kanchipuram). It is believed by many archeologists that this Kailasanathar temple must be the inspiration for Rajaraja Chola I to build the Tanjore Brihadeeswarar temple.