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FIB/SEM

At the Department of Energy’s EMSL, researchers use the focused ion beam/scanning electron microscope (FIB/SEM) to rapidly prepare selected regions of samples for transmission electron microscopy (TEM) and other spectroscopies. In addition, this instrument provides three-dimensional analyses of nanoscale materials and other small objects, and it provides the capability for nanoscale lithography.

 

For more information, visit www.emsl.pnl.gov

 

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Taken on January 13, 2010